Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
Email Facebook Twitter Google+ LinkedIn Comments

Intevac Wins Flat Panel Display Manufacturing System Order
Nov 2001
SANTA CLARA, Calif., Nov. 28 -- Intevac Inc. has received an order from a Japanese customer for a D-STAR flat panel display sputtering system. The system is scheduled for delivery in the first half of 2002.

Intevac's chairman and CEO, Norman H. Pond, said, "This system will be used by our customer to deposit silicon films for the manufacture of low-temperature polysilicon active matrix flat panel displays. Historically, the industry has used a chemical vapor deposition (CVD) process to deposit these amorphous silicon films.
"Intevac's sputtering, or physical vapor deposition process, offers significant advantages to the flat panel display manufacturer," Pond said. "The Intevac sputtering process offers greater flexibility in process control and improved process windows, which should lead to higher process yields."
Pond added that unlike CVD processes, the sputtering process avoids the use of hydrogen compounds, an important factor in achieving successful conversion of the deposited amorphous silicon to polysilicon. "The sputtering process is also inherently cleaner, as it utilizes no toxic gasses," he said.

ConsumerNews & Features

Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2018 Photonics Media
x We deliver – right to your inbox. Subscribe FREE to our newsletters.