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Photonics.com
Sep 2002
Lambda Physik AG, a supplier of pulsed UV lasers, will invest up to 5 million euros ($4.8 million) until 2004 to develop 157 nm laser technology for the production of more powerful microchips. Up to 38 per cent of the project will be funded by the German Federal Ministry of Education and Research (BMBF). The BMBF has also approved funding of a European 157 nm microlithography consortion, part of the European Medea+ project for the development of optical lithography, consisting of industry partners such as ASML, Carl Zeiss, Jenoptik, Schott, Infineon and European universities and research institutions.

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