Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
Email Facebook Twitter Google+ LinkedIn Comments

Wafer Processing Yields High Q Microcavities

Photonics Spectra
Apr 2003
Microcavities require atomically smooth surfaces to obtain ultrahigh Q factors, but until recently such surfaces have been demonstrated only in structures such as droplets or microspheres. Researchers at California Institute of Technology in Pasadena have found a way to obtain ultrahigh Q using wafer-scale processing.

As described in the Feb. 27 issue of Nature, they first created support pillars using photolithography, pattern transfer into the silicon dioxide and selective dry etching of the exposed silicon. They then heated the silicon dioxide to reflow it and forced the molten disc into a toroid-shaped microcavity with an atomically smooth surface and a Q of greater than 100 million.

A lithographic technique using an image produced by photography for printing on a print-nonprint, sectioned surface.
Basic SciencedropletsindustrialmicrocavitiesmicrospheresphotolithographyResearch & TechnologyTech Pulseultrahigh Q factors

Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2018 Photonics Media
x Subscribe to Photonics Spectra magazine - FREE!