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Subaperture Stitching Interferometer

Subaperture Stitching InterferometerThe subaperture stitching interferometer is a six-axis, computer-controlled workstation that enables affordable, automated, high-precision characterization of large-clear-aperture and high-numerical-aperture parts. Combining advanced software algorithms and process automation in a robust hardware package, the tool captures precise metrology data for parts that are up to 200 mm in diameter as well as for those that are strongly concave or convex.

Developed by Rochester, N.Y.-based QED Technologies Inc. for precision optics manufacturing as an affordable alternative to full-aperture metrology, the interferometer uses a mathematical procedure to construct a full-aperture map of a surface from a collection of subaperture maps. The stitching algorithms employ an optimization method to minimize the discrepancies between overlapping regions caused by systematic and random measurement error. The company says that this device, with its integrated calibration capability, is more accurate than a standard full-aperture test and performs deterministic and repeatable measurement.

The workstation comprises a Zygo Fizeau interferometer, a six-axis motion system engineered in cooperation with Schneider Optical Machinery, and stitching algorithms and software (patents pending).

Applications that can benefit from this system include those that rely on high-numerical-aperture optics, such as wide-field-of-view imaging and illumination systems used in medicine, projection and inspection. Applications for clear aperture optics include large-aperture imaging systems, such as those used in lithography.
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Published: January 2004
Glossary
concave
Concave is an adjective used to describe a surface or shape that curves inward or has a hollow or recessed appearance. In the context of geometry or optics, a concave shape is one that curves or slopes inward, creating a depression or cavity. For example: Concave lens: In optics, a concave lens is thinner at the center than at the edges, causing light rays passing through it to diverge. Concave lenses are used to correct nearsightedness or to focus light in specific optical systems. ...
convex
Convex is an adjective used to describe a surface or shape that curves outward, bulges, or has a rounded and outwardly extending appearance. In the context of geometry or optics, a convex shape is one that is curved or sloped outward, creating a surface that is raised or protruding. For example: Convex lens: In optics, a convex lens is thicker at the center than at the edges, causing light rays passing through it to converge. Convex lenses are commonly used in magnifying glasses, eyeglasses...
metrology
Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
algorithmsconcaveconvexFeaturesindustrialinterferometersmetrologyQED Technologies

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