Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
Email Facebook Twitter Google+ LinkedIn Comments

Companies Partner to Enhance Lithography Tools

Photonics Spectra
Nov 2004
ASML MaskTools, a business unit of ASML Holding NV of Santa Clara, Calif., has forged a mul-tiyear agreement with Micron Technology Inc. of Boise, Idaho, to further develop the capability of lithography tools. The companies will focus on low k1 imaging at and below the 95-nm node.

As part of the collaboration, Micron has acquired a global license for ASML's intellectual property, which it will use for volume production. It also will purchase the Wilton, Conn., unit's MaskWeaver for resolution enhancement techniques implementation and the LithoCruiser for ASML scanner optimization. In turn, Micron will supply ASML with mask-making and -characterization services to help qualify its Twinscan ArF scanners for volume production at the 65- and 45-nm nodes.

ASML MaskToolsASML scanner optimizationBusinessindustriallight speedlithography tools

Terms & Conditions Privacy Policy About Us Contact Us
back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2019 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA,

Photonics Media, Laurin Publishing
x Subscribe to Photonics Spectra magazine - FREE!
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.