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4D Awarded for PhaseCam
Jun 2005
TUCSON, Ariz., June 6 -- 4D Technology Corp., a Tucson, Ariz., manufacturer of vibration-insensitive dynamic noncontact surface metrology interferometer systems/software, announced today that its PhaseCam 4010-MW was selected as a recipient of a 2005 R&D 100 Award by R&D Magazine. 4D received a 2004 R&D 100 Award for its FizCam 1000, a Fizeau interferometer configuration.

The PhaseCam 4010-MW is a polarization-based Twyman Green dynamic multiple wavelength interferometer. Its development required the invention of an achromatic, high-speed phase sensor and a high-accuracy, relative wavelength calibration method. The system can acquire data at a single wavelength 5000 times faster than conventional temporal phase-shifting or vertical scanning interferometers and can measure surface shape across discontinuities 15,000 times larger than a typical single wavelength interferometer. It can measure diffuse and specular surfaces and has a wide variety of applications, including semiconductor and industrial inspection.

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The science of measurement, particularly of lengths and angles.
2005 R&D 100 Award4D TechnologyindustrialmetrologyNews & FeaturesPhaseCam 4010-MWSensors & Detectorssurface metrology interferometervibration-insensitive

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