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Groves to Head UAlbany Center for Nanoscale Lithography
Apr 2007
TimothyGroves.jpgThe College of Nanoscale Science and Engineering (CNSE) of the University at Albany yesterday announced that Timothy Groves, PhD, has joined the CNSE faculty as a nanoscience professor and will head the Center for Nanoscale Lithography (CNL), a partnership between CNSE and Vistec Lithography to develop advances in electron-beam (e-beam) lithography, used in nanoelectronics manufacturing. Groves spent the past seven years as director of technology for Vistec, overseeing development of the company's VB300 Gaussian e-beam writer, which is to be installed in the next few weeks at the CNSE. Prior to joining Vistec, Groves held various research and technology development positions within IBM's Semiconductor Research and Development Center in East Fishkill, N.Y., and also with the Hewlett Packard Research Laboratory in Palo Alto, Calif. Groves is the first professor to be recruited under the State University of New York's Empire Innovation Initiative, the aim of which is to recruit world-class professionals to campus. He is a consulting professor of electronic engineering at Stanford University, holds 16 US patents and has authored 58 publications. As CNL director, Groves will assist Vistec in relocating from Cambridge, England, to Albany.

The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
AlbanyCenter for NanoScale LithographyCNLCNSECollege of Nanoscale Science and Engineeringe-beamelectron-beamelectron-beam lithographyEmploymentHewlett PackardIBMindustrialnanonanoelectronicsnanoscaleNews BriefsphotonicsPhotonics Tech BriefsTimothy GrovesVistecVistec Lithography

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