Search
Menu
PI Physik Instrumente - Revolution In Photonics Align LW LB 3/24

Harvard Nanotech Center Orders Plasma-Processing Tools from STS

Facebook X LinkedIn Email
Surface Technology Systems plc (STS) announced that it has sold two plasma-processing systems to Harvard University in Cambridge, Mass. The inductively coupled plasma (ICP) and plasma-enhanced chemical vapor deposition (PECVD) tools will be installed in the university's Center for Nanoscale Systems (CNS), which focuses on how nanoscale components can be integrated into large and complex interacting systems. Andrew Tucker, GM and vice president of sales, ST Systems (USA) Inc., said, "These are the first tools we have sold to Harvard, and are pleased to add another key university research facility with multiple tools to our customer base." STS provides plasma-based etch and deposition technologies for processing non-mainstream semiconductor devices with applications including telecommunications, MEMS (microelectromechanical systems) and nanotechnology. It is based in Newport, Wales.
DataRay Inc. - ISO 11146-Compliant


Published: July 2007
Glossary
nano
An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
nanotechnology
The use of atoms, molecules and molecular-scale structures to enhance existing technology and develop new materials and devices. The goal of this technology is to manipulate atomic and molecular particles to create devices that are thousands of times smaller and faster than those of the current microtechnologies.
photonics
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
plasma
A gas made up of electrons and ions.
CNSCommunicationsfiber opticsHarvardHarvard UniversityICPMEMSnanonanoscalenanotechnologyNews BriefsPECVDphotonicsPhotonics Tech Briefsplasmaplasma-processingsemiconductorsST SystemsSTSSurface Technology Systemstelecommunications

We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.