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Harvard Nanotech Center Orders Plasma-Processing Tools from STS
Jul 2007
Surface Technology Systems plc (STS) announced that it has sold two plasma-processing systems to Harvard University in Cambridge, Mass. The inductively coupled plasma (ICP) and plasma-enhanced chemical vapor deposition (PECVD) tools will be installed in the university's Center for Nanoscale Systems (CNS), which focuses on how nanoscale components can be integrated into large and complex interacting systems. Andrew Tucker, GM and vice president of sales, ST Systems (USA) Inc., said, "These are the first tools we have sold to Harvard, and are pleased to add another key university research facility with multiple tools to our customer base." STS provides plasma-based etch and deposition technologies for processing non-mainstream semiconductor devices with applications including telecommunications, MEMS (microelectromechanical systems) and nanotechnology. It is based in Newport, Wales.

The use of atoms, molecules and molecular-scale structures to enhance existing technology and develop new materials and devices. The goal of this technology is to manipulate atomic and molecular particles to create devices that are thousands of times smaller and faster than those of the current microtechnologies.
The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
A gas made up of electrons and ions.
CNSCommunicationsfiber opticsHarvardHarvard UniversityICPMEMSnanonanoscalenanotechnologyNews BriefsPECVDphotonicsPhotonics Tech Briefsplasmaplasma-processingsemiconductorST SystemsSTSSurface Technology Systemstelecommunications

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