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Cymer Receives Orders for Laser Upgrade Kits

Photonics.com
Jun 1999
SAN DIEGO, Calif., June 17 -- Cymer, Inc. has received orders for more than 50 of its ELS-5005 upgrade kits from semiconductor manufacturers in Korea, Taiwan and the United States. The ELS-5005 upgrade kit was designed as a cost-effective means for customers to lower the operating cost of their existing ELS-5000 lasers to that of Cymer's more advanced ELS-5010 laser. The ELS-5005 upgrade can effect a 45 percent drop in operating cost for Cymer's ELS-5000 lasers in operation at wafer manufacturers producing devices of 0.25-mm and below.

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