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Arbor Photonics Wins Fiber Laser Funding
Sep 2010
ANN ARBOR, Mich., Sept. 23, 2010 — Fiber laser solutions provider Arbor Photonics Inc. has received SBIR Phase IB funding from the National Science Foundation for its work on “High Power Pulsed Fiber Lasers for EUV Lithography.”

The supplemental award will support production of its 3CTM (chirally-coupled core) optical fiber to achieve 200 W average power nanosecond lasers in the 1030 to 1090 nm wavelength range with single-mode output. The optical fiber uses an internal structure to produce single spatial mode output from very large core fibers.

Current 3C fibers with 35 µm central core diameters have already produced >100 kW peak power short pulsed output at power levels on the order of 100 W with M2 <1.1. To meet the increased performance goals, current fiber designs will be scaled to at least 50 µm core diameter.

The Phase IB award is an extension of a Phase I design effort that focused on developing high power, single-emitter fiber laser modules with exceptional beam quality and narrow linewidth. The features are anticipated to permit spectral combining of closely spaced laser channels to produce a single beam of nanosecond pulses with an average power of several kilowatts.

The system is intended for use in next generation laser produced plasma extreme ultraviolet lithography.

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1. A bundle of light rays that may be parallel, converging or diverging. 2. A concentrated, unidirectional stream of particles. 3. A concentrated, unidirectional flow of electromagnetic waves.
Pertaining to optics and the phenomena of light.
optical fiber
A thin filament of drawn or extruded glass or plastic having a central core and a cladding of lower index material to promote total internal reflection (TIR). It may be used singly to transmit pulsed optical signals (communications fiber) or in bundles to transmit light or images.
A gas made up of electrons and ions.
spatial mode
Also known as transverse mode. The configurations of energy storage, relative to the structure of a laser resonator, that define the relative intensity distribution of the laser beam.
Pertaining to or as a function of wavelength. Spectral quantities are evaluated at a single wavelength.
3C fiber3CTMAmericasArbor PhotonicsbeamBusinesscentral corechirally coupled corecore fiberEUVEUV lithographyextreme ultravioletfiber lasersfiber opticsindustriallaser channellithographynanosecondNational Science Foundationopticaloptical fiberopticsPhase IPhase IBplasmapulsepulsed fiber laserSBIRsingle modespatial modespectralultravioletwavelengthlasers

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