Gigaphoton Confirms Debris Mitigation Technology
Based in Oyama, Japan, Gigaphoton Inc., a lithography light source manufacturer, has confirmed its
original technology for mitigating debris with magnetic fields for laser-produced
plasma (LPP) light sources. It plans to push forward with a mass-production model
in the beginning of 2012. Gigaphoton has been working since 2002 on the development
of LPP light sources for extreme-UV lithography in pursuit of higher output and
better cost of operation.
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Published: September 2011
Asia-PacificBusinessCO2 lasersdebris mitigationEUV lithographyGigaphotonindustrialJapanlaser-produced plasmalight speedlithography light sourceLPPmagnetic powerSn atomsSn debrisSn fragmentsSn ionsSn targettinLasers