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Globalfoundries Vet Wurm Named Lithography Director at Sematech

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ALBANY, N.Y., Oct. 4, 2011 — Dr. Stefan Wurm was named Sematech’s director of lithography, the company announced. Wurm is a veteran of Globalfoundries, based in Milpitas, Calif., and has more than 20 years of experience in industry and R&D.

Wurm will be responsible for assuring that the strategic direction and execution of the company’s lithography program support areas that are critical to lithography technology.

A Globalfoundries assignee, Wurm most recently served as Sematech’s associate director of lithography. Before that, he was its EUV program manager for four years.

Sematech is an international consortium of semiconductor manufacturers that enables worldwide EUV infrastructure development.

For more information, visit: www.sematech.org  
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Published: October 2011
Glossary
lithography
Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of a desired pattern onto a photosensitive material called a resist, which is coated onto the substrate. The resist is then selectively exposed to light or other radiation using a mask or reticle that contains the pattern of interest. The lithography process can be broadly categorized into several...
AmericasBusinessEmploymentEUVextreme-ultravioletGlobalfoundriesindustriallithographyNew YorkSematechsemiconductor manufacturerStefan Wurm

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