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Micronic Expands SLM Licensing Agreement

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TABY, Sweden, Dec. 21 -- Micronic Laser Systems AB has signed an agreement in principle to expand and strengthen its cooperation with Fraunhofer Institute for Microelectronic Circuits and Systems (Fraunhofer IMS). The agreement extends by three years the development collaboration between Micronic and Fraunhofer IMS and expands Micronic's present exclusive license rights for spatial light modulator (SLM) technology for direct-write and photomask writing with inspection and measurement. The cooperation covers several SLM component generations aimed to support future semiconductor design nodes....Read full article

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    Published: December 2001
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