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Phase-Shifting Interferometry Measures Surfaces

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Hank Hogan

There are no good vibrations when it comes to precise surface measurements. Mirrors, for instance, are often manufactured to specifications of fractions of a wavelength, and that requires surface measurement resolutions of better than 100 nm. Sources of vibration such as air handlers and passing trucks can render those precise measurements difficult or impossible. A team from the Optical Sciences Center at the University of Arizona in Tucson has found a way to make such measurements despite the world's shake, rattle and roll. Jim Burge, an assistant professor, and graduate student Chunyu...Read full article

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    Published: March 2002
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