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Positioning Systems Make Submicron-Level Moves

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Bill Hennessey, Dan Crews and Don Fuller, Alio Industries

Demanding by their very nature, submicron and nanometer-scale positioning tasks are further complicated when the management of motion is under vacuum or when it requires extended travel, more repeatability, higher speed or greater uptime — of course, at lower cost. Accuracy, repeatability, acceleration and force are determined largely by stage configuration and design. Ball-screw-driven technology. These stages are perhaps the most common and the least expensive. When coupled to servomotors, they receive position feedback from linear or rotary encoders, or use stepper motors that count...Read full article

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    Published: March 2004
    CommunicationsenergyFeatureshigh-speed applicationsindustrialnanometer-scale positioningstepper motorssubmicron

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