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Cymer Inc., a San Diego supplier of deep ultraviolet light sources used in semiconductor manufacturing, announced that it shipped a Cymer XLA 100 series argon fluoride light source to ASML Holding NV, a provider of lithography systems for the semiconductor industry, last week.   . . .   A $7.5 million grant to Cornell University from Fred Kavli and the Kavli Foundation of Oxnard, Calif., will endow the newly established Kavli Institute for Nanoscale Science. The institute will be based on the Cornell campus in Ithaca, N.Y.Read full article

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    Published: March 2004
    Glossary
    deep ultraviolet
    Deep ultraviolet (DUV or deep-UV) refers to a specific range of ultraviolet light with shorter wavelengths than those in the UV-A and UV-B regions. The exact wavelength range considered as DUV can vary, but it often includes wavelengths from around 100 to 300 nanometers. DUV light is shorter in wavelength and higher in energy than visible light. DUV light covers the spectrum from approximately 100 to 300 nanometers. This range is subdivided into different sub-bands, such as UV-C (100 to...
    ASML HoldingCornell UniversityCymerdeep ultravioletindustrialKavli Institute for Nanoscale ScienceNews BriefsPhotonics Tech Briefs

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