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Lithographic Process Yields 3-D Photonic Crystal for Near-IR

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Scientists at Massachusetts Institute of Technology in Cambridge have described a three-dimensional photonic crystal in silicon, with deliberately introduced point-defects, that displays resonant signatures around telecommunications wavelengths. They reported the development in the June 3 issue of Nature. In the layer-by-layer fabrication technique, scanning-electron-beam lithography and spin-on dielectric planarization produce a hole and a rod layer in each process cycle. After four cycles, a hydrofluoric acid solution removes the spin-on dielectric, creating seven functional layers. The...Read full article

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    Published: July 2004
    As We Go To PressBasic ScienceBreaking NewsCommunicationsConsumerindustrialMassachusetts Institute of TechnologyPresstime Bulletinresonant signaturesilicontelecommunications wavelengthsthree-dimensional photonic crystal

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