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Deposition Sciences Inc. - Difficult Coatings - LB - 8/23

Nanocrystalline Cerium Oxide Improves Glass Polishing Operations

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A new plasma arc particle production process helps meet stringent requirements.

Dr. Patrick G. Murray, Nanophase Technologies Corp.

Performance improvements are increasingly being sought in a variety of technologically advanced polishing applications related to the optics and microelectronics industries. From the production of photomask blanks to the fabrication of memory and process devices, better surface roughness coupled with reduced defectivity is critical to achieving the requirements of future technology nodes. Cerium oxide (ceria) is widely used in glass and silicon oxide polishing operations because of its unique ability to polish both chemically and mechanically. The polishing of glass using ceria particles,...Read full article

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    Published: August 2004
    Glossary
    cerium oxide
    A polishing material that has a quicker polishing action than rouge (ferric oxide) and that is cleaner to handle.
    Basic Sciencecerium oxideFeaturesindustrialmicroelectronics industriesOpticsphotomask blankssilicon oxide polishingWafers

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