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Deposition Sciences Inc. - Difficult Coatings - LB - 8/23

OPTICAL LITHOGRAPHY

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Part of the SPIE Field Guide series, the 134-page Field Guide to Optical Lithography provides an overview of the process, including substrate preparation, photoresist spin coating and postapply and postexposure bake. The spiral-bound volume’s section on image formation includes diffraction, Maxwell’s equations, Fourier optics, and spatial coherence and oblique illumination. It provides discussions on imaging into a photoresist, which encompass standing waves, Fresnel reflectivity, swing curves, and top and bottom antireflection coatings. Photoresist chemistry, such as absorption of light and...Read full article

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    Published: October 2006
    antireflection coatingsBasic ScienceBreakthroughMediaCoatingsFourier opticsindustrialNew MediaSPIE

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