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Nanometrics Files New Complaint Against Nova Measuring Instruments

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Nanometrics Inc. of Milpitas, Calif., a supplier of metrology equipment to the semiconductor industry, announced yesterday it has filed a complaint in the US District Court for the Northern District of California against Israel-based Nova Measuring Instruments Ltd. for infringing its patents relating to optical critical dimension technology, or scatterometry. “When we merged with Accent Optical, we acquired a number of patents and other fundamental intellectual property in the field of scatterometry, including the patents that are the subject of this new complaint. As a result, we are now in...Read full article

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    Published: October 2006
    Glossary
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    scatterometry
    A measurement technique used for the rapid quantitative evaluation of surface quality based on the detection and analysis of light scattered from the surface.
    ultraviolet
    That invisible region of the spectrum just beyond the violet end of the visible region. Wavelengths range from 1 to 400 nm.
    complaintinfringementmetrologyNanometricsNews BriefsNova Measuring InstrumentspatentPhotonics Tech Briefsreflectometryscatterometrysemiconductorsultraviolet

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