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EUV LITHOGRAPHY

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The 700-page volume EUV Lithography provides comprehensive information on extreme-ultraviolet (EUV) lithography for practitioners and for those needing an introduction to the field. Written by experts in the technology, the resource addresses EUV optics, source technology, wavefront measurement techniques for optical testing, mask and mask metrology, resist technology and system patterning performance. The topic of contamination and its control in EUV lithography scanners also is discussed. Vivek Bakshi, ed.; SPIE Press, Bellingham, Wash.; John Wiley & Sons Inc., Hoboken, N.J., 2009; $89...Read full article

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    Published: June 2009
    Glossary
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    BreakthroughMediaindustrialmetrologyNew MediaSPIEultraviolet (EUV) lithography

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