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Nanofabrication Facility Taps EV Group

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ST. FLORIAN, Austria, March 18, 2010 – EV Group, supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, has shipped two wafer bonding systems to the University of Michigan's Lurie Nanofabrication Facility (LNF). Supported by the National Science Foundation, the LNF is a research center for MEMS and Microsystems and is a member of the National Nanotechnology Infrastructure Network (NNIN). With a wafer bonder and aligner already installed at the facility, these new systems will increase the level of the university's overall MEMS research efforts by providing high-force wafer...Read full article

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    Published: March 2010
    Glossary
    nano
    An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
    nanotechnology
    The use of atoms, molecules and molecular-scale structures to enhance existing technology and develop new materials and devices. The goal of this technology is to manipulate atomic and molecular particles to create devices that are thousands of times smaller and faster than those of the current microtechnologies.
    optoelectronics
    Optoelectronics is a branch of electronics that focuses on the study and application of devices and systems that use light and its interactions with different materials. The term "optoelectronics" is a combination of "optics" and "electronics," reflecting the interdisciplinary nature of this field. Optoelectronic devices convert electrical signals into optical signals or vice versa, making them crucial in various technologies. Some key components and applications of optoelectronics include: ...
    AmericasbiomedicalBusinessEV GroupindustrialKen WiseLurie Nanofabrication FacilityMEMSnanonanofabricationnanotechnologyNational Nanotechnology Infrastructure NetworkNational Science FoundationOpticsoptoelectronicssemiconductorsUniversity of Michiganwafer bonding systemsWafers

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