Search
Menu
Deposition Sciences Inc. - Difficult Coatings - LB - 8/23

Partnership Eyes Deep-UV Photolithography

Facebook X LinkedIn Email
Cymer Inc. and Carl Zeiss Lithos have teamed up to facilitate the development of optical components and modules for lithography light sources. San Diego-based Cymer supplies illumination sources for deep-UV photolithography, and Carl Zeiss Lithos of Germany manufactures optics. Engineers from both companies will investigate how optics and light sources interact. They also will try to achieve finer resolutions and smaller linewidths to enable further advances in semiconductors in compliance with the Semiconductor Industry Association road map. Zeiss will contribute optics and coatings,...Read full article

Related content from Photonics Media



    Articles


    Products


    Photonics Handbook Articles


    White Papers


    Webinars


    Photonics Dictionary Terms


    Media


    Photonics Buyers' Guide Categories


    Companies
    Published: July 1999
    BusinessCoatingsindustriallight speed

    We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.