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Carl Zeiss Ships First PROVE System

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JENA, Germany, and MAKUHARI, Japan, Sept. 14, 2010 — Carl Zeiss recently reported the delivery of the first PROVE Registration and Overlay Metrology System for photomasks to NuFlare Technology, the world leading supplier of mask writers based on electron-beam technology. “We are pleased to receive the first Carl Zeiss registration tool,” said Fumiaki Shigemitsu, director of NuFlare Technology. “The excellent resolution and the unprecedented measurement precision of PROVE are inevitable to develop and optimize our latest generation e-beam mask writers, and enables us to speed up our own tool roadmap.” After...Read full article

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    Published: September 2010
    Glossary
    illumination
    The general term for the application of light to a subject. It should not be used in place of the specific quantity illuminance.
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    Asia-PacificBusinessCarl Zeisselectron-beamEuropeFumiaki ShigemitsuGermanyhigh-resolution imagingilluminationImagingin-die pattern placementJapanmetrologyNuFlare TechnologyOliver KienzlephotomasksPROVE Registration and Overlay Metrology Systemregistration errorsTest & Measurement

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