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Deposition Sciences Inc. - Difficult Coatings - LB - 8/23

Breaking wavelength limits enables chips with finer features

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Ashley N. Paddock, [email protected]

A new way to break through wavelength-related limits to feature size in state-of-the-art silicon chips could enable further leaps in computational power. The microchip revolution has seen a steady shrinking of features on silicon chips, packing in more transistors and wires to boost their speed and data capacity. But in recent years, the technologies behind these chips have begun to bump up against fundamental limits, such as the wavelengths of light used for critical steps in their manufacture. The new technique allows the production of complex shapes rather than just lines and can...Read full article

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    Published: March 2012
    Glossary
    fluorescence
    Fluorescence is a type of luminescence, which is the emission of light by a substance that has absorbed light or other electromagnetic radiation. Specifically, fluorescence involves the absorption of light at one wavelength and the subsequent re-emission of light at a longer wavelength. The emitted light occurs almost instantaneously and ceases when the excitation light source is removed. Key characteristics of fluorescence include: Excitation and emission wavelengths: Fluorescent materials...
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    Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer geometric patterns from a photomask or reticle to a photosensitive chemical photoresist on a substrate, typically a silicon wafer. The basic steps of photolithography include: Cleaning the substrate: The substrate, often a silicon wafer, is cleaned to remove any contaminants from its surface. ...
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