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Veeco Wins Orders for Automated Semiconductor Tools

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PLAINVIEW, N.Y., Jan. 11 -- Veeco Instruments Inc. has received multiple-unit orders valued at $4.7 million for its Dimension 9000TR atomic force microscope and its recently introduced chemical-mechanical polishing metrology tool, the Dimension Vx Atomic Force Profiler (AFP). Semiconductor manufacturers in Europe, the US, and Asia/Pacific Rim placed the orders for the semiconductor production metrology tools, which are manufactured at Veeco Metrology Group's Santa Barbara facility. Veeco's Dimension 9000TR measures STI, RC1, RC2, RR and other trench structures in logic and memory...Read full article

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    Published: January 2000
    Glossary
    metrology
    Metrology is the science and practice of measurement. It encompasses the theoretical and practical aspects of measurement, including the development of measurement standards, techniques, and instruments, as well as the application of measurement principles in various fields. The primary objectives of metrology are to ensure accuracy, reliability, and consistency in measurements and to establish traceability to recognized standards. Metrology plays a crucial role in science, industry,...
    Basic ScienceindustrialmetrologyMicroscopyNews & Features

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