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Oxford Instruments Installs ITRI's Plasma Etch Equipment

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ABINGDON, England, Oct. 30, 2017 — Oxford Instruments Nanotechnology Tools Ltd. has installed plasma etch equipment in the applications laboratory of the Industrial Technology Research Institute (ITRI) in Taiwan. This installation further enhances the existing etch and deposition capabilities already provided by Oxford Instruments at the facility. The PlasmaPro 100 Cobra and PlasmaPro 100 Polaris ICP etch tools were installed to focus on the optoelectronic, wide bandgap discrete device and sensors markets. “As a company, we are dedicated to delivering process solutions to our customers,” said Ian...Read full article

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    Published: October 2017
    Glossary
    nano
    An SI prefix meaning one billionth (10-9). Nano can also be used to indicate the study of atoms, molecules and other structures and particles on the nanometer scale. Nano-optics (also referred to as nanophotonics), for example, is the study of how light and light-matter interactions behave on the nanometer scale. See nanophotonics.
    Oxford InstrumentsNanotechnology ToolsIndustrial Technology Research InstituteITRIpartnershipsnanoAsia-PacificindustrialBusiness

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