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Photonics Dictionary

microcircuit manufacturing

The formation of transistors, diodes, capacitors, resistors and other electronic elements directly on a flake of silicon by etching and selective absorption of doping elements. A circuit diagram drawn on a large scale is reduced optically about 200 times to form a single circuit. Generally, many microcircuits are made together on the same piece of silicon by a step-and-repeat process, using photoresist to protect those surface areas that are not to be etched. Microcircuit manufacturing equipment includes reduction cameras, step-and-repeat cameras, contact printers, special high-resolution lenses, etching and doping equipment.

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