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NANOTRANSLATION STAGES

Aerotech Inc.Request Info
 
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pNanoUltracompact nanotranslation stages from Aerotech Inc. are available in X, X-Y and X-Y-Z configurations. The ANT-25L stages, which measure 100 x 100 x 66 mm, offer 10-nm closed-loop resolution and turnkey drive and control electronics for high throughput. The company says the stages' advanced real-time axis calibration system allows the highest level of accuracy and that the direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale resolution. High-speed 32-MHz electronic circuitry allows fast positioning at more than 250 mm/s. The linear servo drives provide in-position stability, and no-creep linear bearings allow maintenance-free operation. The stages can be mounted flat or on edge for flexibility.


Published: October 2001
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