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Photonics Spectra
Mar 2003
Tiger Optics LLCRequest Info
Designed for use in semiconductor manufacturing and online process control, the MTO-1000-CH4 methane detector offered by Tiger Optics LLC prevents photomask damage by detecting fugitive hydrocarbons that can degrade photolithographic lenses. It uses CW laser technology and cavity ringdown spectroscopy to measure methane in milliseconds with absolute accuracy down to 2.0 ppb. The company says the device provides early detection of purifier breakthrough or sources of cross-contamination in the gas delivery system. The MTO-1000-CH4 does not require calibration, is corrosion-resistant and allows CH4 detection in up to four gas streams.


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