MEMS METROLOGY
Veeco Instruments Inc.Request Info
Veeco Metrology Group has added dynamic MEMS measurement capability to its Wyko NT1100 optical profiler. This option allows three-dimensional characterization of microdevices as they actuate for assessing their functionality and measuring in- and out-of-plane dimensions. It includes a custom illumination source, electronics and SureVision analysis software, which can be used to determine parameters such as resonant frequency, radius of curvature, shape/distortion and deflection. The system captures a series of 3-D measurements and generates a video of the device as it cycles through its range of motion. The Wyko NT1100 uses noncontact, white light interferometry to measure features from 0.1 to 2 mm in height.
https://www.veeco.com
/Buyers_Guide/Veeco_Instruments_Inc/c15663
Published: March 2003
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:
When you click "Send Request", we will record and send your personal contact information to Veeco Instruments Inc. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our
Privacy Policy and
Terms and Conditions of Use.
Register or login to auto-populate this form:
Login
Register
* Required