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WAFER INSPECTION

Photonics Spectra
Mar 2003
Rudolph Technologies Inc.Request Info
 
Wafer Inspection An automated inspection system for 200- and 300-mm wafers has been released by Rudolph Technologies Inc. The WaferView provides macrodefect inspection of wafer surfaces at throughputs of >100 wafers per hour. The company says the system's proprietary full-color image processing detects 95% of photolithography defects and correctly classifies them 85% of the time. The WaferView has a library of classified defects and can be programmed with new defect classes, enabling users to customize defect detection.


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