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WAFER SCRIBING

Photonics Spectra
Sep 2003
IPG Photonics, Microsystems Div.
 
JPSA Laser The ChromaDice UV diode-pumped solid-state laser system provides high-speed blue LED wafer scribing with typical yields greater than 99%, according to its producer, JPSA Laser. The system cuts a square chip with consistently narrow widths as small as 5 µm. The process is faster than mechanical scribing and has a throughput of up to eight wafers per hour with low impact on LED performance. With automation, the system takes less than 1 min to load and align, and a single operator can run multiple systems.


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