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BEAM DELIVERY

Photonics Spectra
Mar 1998
IPG Photonics, Microsystems Div.
 
The Microtech Series of UV laser image processing beam delivery systems from JP Sercel Associates Inc. are suited for lithography, selective material removal, 3-D micromachining, high-precision drilling, cutting, marking and surface scanning. They have on-target process viewing with zoom control, continuously variable demagnification and on-target fluence, 43 to 203 demagnification and micron-resolution optics. A beam homogenizer can control the intensity profile.


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