Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
share
Email Facebook Twitter Google+ LinkedIn

EXCIMER LIGHT SOURCE

Photonics Spectra
Jun 2004
Cymer Inc.Request Info
 
EXCIMER LIGHT SOURCE Cymer Inc. has announced the XLA 105 argon-fluoride excimer light source, which supports 65-nm photolithography applications. It operates at a 4-kHz repetition rate, outputs at 40 W and provides full imaging capability for 200- and 300-mm lithography scanners. Bandwidth is ≤0.2 pm FWHM and ≤0.50 pm at 95% energy integral, enabling exposure of important semiconductor features with high-numerical-aperture lens designs, and requiring fewer calcium-fluoride elements. Pulse duration is ≥70 ns, which reduces peak fluence for longer scanner optics lifetimes. The device is based on proprietary master oscillator power amplifier technology with dual gas discharge chambers.


REQUEST INFO ABOUT THIS PRODUCT

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address:
Address 2:
City:
State/Province:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required

When you click "Send Request", we will record and send your personal contact information to Cymer Inc. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.
MORE FROM PHOTONICS MEDIA
argon-fluoride excimer light source
argon-fluoride excimer light sourceCymer Inc.dual gas discharge chambersindustriallithography scannersNew Productsphotolithography applications

Terms & Conditions Privacy Policy About Us Contact Us
back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2018 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, info@photonics.com

Photonics Media, Laurin Publishing
x Subscribe to Photonics Spectra magazine - FREE!
X
Are you interested in this product?
When you click "Send Request", we will send the contact details you supply to Cymer Inc. so they may respond to your inquiry directly.

Email Address:
Name:
Company:
Stop showing me this for the remainder of my visit
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.