SCANNING STAGE
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsRequest Info
PI (Physik Instrumente) LP has unveiled a long-travel piezo scanning and nanomanipulation system that offers integrated capacitive feedback and closed-loop control that, the company says, boost linearity by up to three orders of magnitude over conventional stages. The P-563.3CD PIMars provides 300 × 300 × 300-µm travel in the X-Y-Z axes, with nanometer resolution. It has a 66-mm2 clear aperture and a parallel kinematics design that features only one moving part. Response is in the millisecond range. Available versions include ultrahigh-vacuum, invar, superinvar and titanium.
https://www.pi-usa.us/en
/Buyers_Guide/PI_Physik_Instrumente_LP_Motion_Control_Air/c11819
Published: July 2004
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