Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
share
Email Facebook Twitter Google+ LinkedIn

VACUUM COATING SYSTEM

Photonics Spectra
Jan 2005
Edwards Vacuum Inc.Request Info
 
Combining a 600-mm-wide coating chamber and a high-throughput vacuum pumping system, the TF600 from BOC Edwards delivers increased productivity and flexibility in researching, developing and producing substrates used in the semiconductor, laser and scientific industries. Placed at the rear of the chamber to provide faster pumpdown, the pumping system features options such as diffusion, turbomolecular and cryogenic high-vacuum pumps, and the XDS 35i dry scroll pump for backing and chamber roughing. Process options include resistance evaporation, electron beam, RF, DC and pulsed DC sputtering. The system is suitable for applications such as lift-off and ion-beam processing.


REQUEST INFO ABOUT THIS PRODUCT

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address:
Address 2:
City:
State/Province:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required

When you click "Send Request", we will record and send your personal contact information to Edwards Vacuum Inc. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.
MORE FROM PHOTONICS MEDIA
energy
Photonics Buyers' Guide
Looking for Substrates? There are 55 companies listed in the Photonics Buyers' Guide.
Browse Cameras & Imaging, Lasers, Optical Components, Test & Measurement, and more.
BOC Edwardscoating chambercoatingsenergyNew Productssemiconductorvacuum pumping systemlasers

Terms & Conditions Privacy Policy About Us Contact Us
back to top
Facebook Twitter Instagram LinkedIn YouTube RSS
©2018 Photonics Media, 100 West St., Pittsfield, MA, 01201 USA, info@photonics.com

Photonics Media, Laurin Publishing
x Subscribe to Photonics Spectra magazine - FREE!
X
Are you interested in this product?
When you click "Send Request", we will send the contact details you supply to Edwards Vacuum Inc. so they may respond to your inquiry directly.

Email Address:
Name:
Company:
Stop showing me this for the remainder of my visit
We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.