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NANOPOSITIONING STAGES

Photonics Spectra
Feb 2005
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
 
NANOPOSITIONING STAGES PI (Physik Instrumente) LP has released the P-541 series closed-loop nanopositioning stages, which provide multiaxis motion to 120 × 120 × 120 µm and resolution to 0.1 nm, all in a low-profile package. Features include an 80 X 80-mm aperture for optical inspection and microscopy, and a parallel-kinematics flexure guiding system that delivers friction-free motion with nanometer-precision trajectory control. X-Y, Z and X-Y-Z versions are available, with a choice of 30- or 120-µm travel ranges and of capacitive or strain-gauge feedback sensors. Ceramic-insulated piezo drives provide optimum vacuum compatibility and increased lifetimes. The 16-mm-high stages integrate easily into high-resolution microscopy applications. They are suitable for scanning microscopy, nanomanipulation, bio- and nanotechnology, nanoimprint, and semiconductor and data storage test equipment.


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