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Photonics Spectra
May 2005
piezosystem jena GmbHRequest Info
NANOPOSITIONING The nanoX series of nanopositioning stages launched by piezosystem jena GmbH feature an active bidirectional gear design that reduces the push/pull force ratio to up to roughly 1:1 without affecting the trajectory. Both stroke direction senses of the stages are controlled by the high-pressure force generation of the company's piezoelectrical actuators. The stages, which provide a total travel range of up to 480 µm with sub-nanometer resolution, have applications in imaging, mask alignment, scanning microscopy, materials sciences and metrology nanopositioning.


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bidirectional gear designmetrologymetrology nanopositioningMicroscopynanopositioning stagesNew Productspiezoelectrical actuatorspiezosystem jena GmbH

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