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THIN FILMS

Photonics Spectra
May 2005
SAES Getters USA Inc.Request Info
 
The SAES Getters Group has introduced its PaGe line of getter thin films for impurity removal in hydrogen-sensitive packages, microelectronic hermetic devices in ceramic or metallic packages, and wafer-level MEMS/MOEMS. The thin films are a few microns thick and can be deposited and patterned on silicon, glass, germanium, metallic and ceramic substrates in a variety of shapes. Through chemical absorption of all active gases, the thin films keep operating conditions under control, increasing the reliability and lifetime of vacuum and inert gas sealed packages.


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