Search
Menu
PI Physik Instrumente - Revolution In Photonics Align LW LB 3/24

METROLOGY TOOLS

Filmetrics, KLA InstrumentsRequest Info
 
Facebook X LinkedIn Email
METROLOGY TOOLS Available from Filmetrics is its F80 line of stand-alone and integrated thin-film metrology tools. Based on thickness-imaging technology, which generates thousands of thickness readings at each measurement pad location and which enables a thickness-based approach to pattern recognition, the tools are immune to image contrast inversion problems. The result is an improvement in reliability and a decrease in the number of recipes required. Measurement pad locations can be determined with software, rather than with the high-precision stages used in conventional metrology tools. Options include 1- and 2-D high-resolution thickness mapping.


Published: June 2005
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:


When you click "Send Request", we will record and send your personal contact information to Filmetrics, KLA Instruments by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our Privacy Policy and Terms and Conditions of Use.

Register or login to auto-populate this form:
Login Register
* Required

Filmetricsintegrated thin-film metrology toolsmetrologyNew Productsstand-aloneTest & Measurement

We use cookies to improve user experience and analyze our website traffic as stated in our Privacy Policy. By using this website, you agree to the use of cookies unless you have disabled them.