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Large-Format VUV Optical Chamber
Dec 2005
IPG Photonics, Microsystems Div.Request Info
For UV Excimer Laser Beam Delivery Systems
HOLLIS, N.H., Dec. 5 -- JP Sercel Associates (JPSA) has introduced a large-format VUV (vacuum ultraviolet) optical chamber for UV excimer laser beam delivery systems (BDS). The optical chamber is the latest addition to JPSA’s new large-format line of BDS modules, options and components, and is designed to integrate with its recently introduced Microtech MBD2 industrial-grade BDS.
Lenses, beam expanding telescopes, beam homogenizers, spacers and other components can be positioned in the chamber and integrated into the BDS using JPSA’s universal dovetail mounting system. The optical chamber features a 50 mm x 50 mm clear aperture that allows passage of a larger-diameter homogenized beam without beam corner clipping. The chamber is designed for many different types of optics mounts with precision adjustments in the X, Y, Z and theta dimensions, allowing the user to modify, shape or expand the UV excimer laser beam through the use of beam-shaping telescopes, beam homogenizers, imaging lenses, condensing lenses and other optics. All can be accessed through O-ring sealed removable panels.

The new optical chamber is a VUV-capable module, and can be used with short-wavelength UV excimer beams including 157 nm, 193 nm and 248 nm. There is no grease or oil in any of JPSA’s VUV beam delivery designs, and all organic materials have been removed to prevent degradation by UV radiation and consequent contamination of the optics and interior chambers. The company says the absence of such contaminants contributes to longer optics life. JPSA’s optical chamber can be purged with high-purity gases such as nitrogen.

JPSA products and services include UV excimer and DPSS laser micromachining systems, UV and VUV laser beam delivery systems, UV laser materials processing development, optical damage testing and excimer laser refurbishment services. JPSA Laser operates a high-performance UV laser job shop as well as a systems engineering and manufacturing business.

For more information, visit:; e-mail:

J P Sercel Associates
17D Clinton Dr.
Hollis, NH 03049
Phone: (603) 595-7048
Fax: (603) 598-3835


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BDSbeambeam delivery systemDPSS lasersexcimerindustriallensesoptical chamberProductsSercelUVVUVlasers

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