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ExciStar XS Excimer Laser
Jul 2006
Coherent Inc.Request Info
SANTA CLARA, Calif., July 24, 2006 -- The new ExciStar XS from Coherent Inc. is a compact, economical excimer laser that the company said offers exceptional performance and lifetime characteristics. 

The air-cooled ExciStar XS measures only 649 x 300 x 400 mm, yet delivers up to 10 mJ/pulse at 193 nm with an energy stability of < 2% (1 s), at repetition rates of up to 500 Hz. The use of CoherentExcistarXS.jpgAlmeta XS all-metal-tube construction, corona preionization, an all-solid-state pulser and electrostatic dust removal combine to yield a laser tube lifetime of 500 million pulses and an optics lifetime of 100 million pulses.

The ExciStar XS can operate at 157 nm (F2), 193 nm (ArF), 248 nm (KrF), or 351 nm (XeF). Its compact size and low total cost of ownership will make it particularly attractive to laboratory and research users, especially for marking applications, the company said. The ExciStar XS is RoHS compliant.

For more information, visit:; e-mail:

Coherent Inc.
5100 Patrick Henry Dr.
Santa Clara, CA 95054
Phone: (408) 764-4000
Fax: (408) 764-4800


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