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HybrYX Air-Bearing Stage

Photonics.com
Jul 2006
Newport CorporationRequest Info
 
IRVINE, Calif., July 31, 2006 -- Newport Corp. has announced the latest addition to its DynamYX family of air-bearing systems -- the HybrYX single-plane XY hybrid stage. This latest motion control solution from Newport provides customers with all the advantages of a single-plane air-bearing stage at a much lower cost, the company said. The HybrYX stage is an ideal solution for semiconductor applications including front-end wafer inspection and lithography and can be used for many flat panel inspection and processing applications.

NewportHybrYX.jpg"Our new HybrYX stage is very attractive solution for semiconductor equipment manufacturers because it is an evolution in performance and value. It blends the cost-effectiveness of a mechanical bearing stage with the precision of a single-plane air-bearing design and delivers superior performance," said Walter Silvesky, Newport's senior business development manager. "With a powerful combination of throughput, precision, functionality, reliability and esthetics, this stage is an ideal choice for almost any semiconductor application when both stage performance and cost cannot be compromised."

Along with the DynamYX line of air bearing systems, Newport said the HybrYX continues the company's tradition of delivering the highest level of positioning performance and throughput commercially available. It features ultralow velocity ripple and following error; exceptional dynamic straightness and flatness; minimum step-and-settle times into very small and stable target windows and reliable, long-life operation.

Like the DynamYX 300 and DynamYX GT, the HybrYX is also available with the company's patented ZT3 (Z-tip-tilt-theta) stage and integrated vibration isolation with reaction force compensation. For more information, visit: www.newport.com/hybryx; e-mail: sales@newport.com

Newport Corp.
1791 Deere Ave.
Irvine, CA 92606
Tel 949-863-3144
Fax 949-253-1800



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air bearingDynamicDynamYXhybridHybrYXindustriallithographyMotion ControlNewportProductssemiconductorSilveskystageXY

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