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Photonics Spectra
Sep 2006
Coherent Inc.Request Info
Coherent Inc. has expanded its Lambda SX industrial excimer laser series with the addition of three models, each operating at up to 300 Hz. The LSX 200C delivers 200 W at 308 nm (XeCl); the LSX 200K, 200 W at 248 nm (KrF); and the LSX 300K, 300 W at 248 nm (KrF). The lasers feature solid-state switching, an internal resonator design for improved beam stability, PowerLok technology for burst operation stabilization, and TimeLok operation for more accurate triggering and time jitter reduction. They incorporate a software interface for improved real-time control and the implementation of e-diagnostics.


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Coherent Inc.excimer laserindustrialNew Productssolid-state switching

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