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GAUGING PROBES

Photonics Spectra
Oct 2006
SIOS Messtechnik GmbHRequest Info
 
SIOS_LM.jpgThe LM series laser-interferometric motor-driven gauging probes offered by SIOS Meßtechnik GmbH are available in two models that can measure distances of up to 20 or 50 mm, respectively, with 1-nm resolution. They achieve metric precision of up to 10 nm and linearity of ≤2.5 nm. They enable reproducible measurements at constant applied force and are compatible with conventional metrological systems. Their fiber optic lightguide protects them from thermal effects and electromagnetic interference. A microcontroller in the signal-processing unit analyzes signals from the interferometer and from the ambient temperature and barometric-pressure sensors, and computes scaled fringe counts that are output to a keypad/display unit or to a PC via an RS-232 interface.


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laser-interferometric motor-driven gauging probesNew ProductsSensors & DetectorsSIOS Meßtechnik GmbH

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