FILM METROLOGY
Rudolph Technologies Inc.Request Info
A transparent film metrology system from Rudolph Technologies Inc., called the SpectraLaser UTF, provides guaranteed subangstrom thickness accuracy of ±0.5 A and tool-to-tool matching of ±0.1 A. The system can characterize ultrathin films and ultrathin film stacks. It is suitable for semiconductor wafer manufacturing applications where all chips must have identical film thicknesses.
http://www.rudolphtech.com
/Buyers_Guide/Rudolph_Technologies_Inc/c12952
Published: October 1998
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