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SPECTROSCOPIC ELLIPSOMETER

Photonics Spectra
Jan 2007
Ocean Optics Inc.Request Info
 
OceanOptics_SpecElRelease1.gifThe SpecEL-2000-VIS is an easy-to-use benchtop spectroscopic ellipsometer designed for thin-film measurement. Offered by Ocean Optics Inc., the instrument is suitable for working with semitransparent flat samples, such as wafers and glass plates, providing data on the thickness, refractive index, absorption and ratio of film components in a layer of film. The ellipsometer can detect thicknesses between 1 nm and 5 μm and measure refractive indices across the 450- to 900-nm spectral range. The 52 × 33 × 24-cm device features an integrated light source, a spectrometer, two polarizers and a 32-bit Windows-based PC with software that enables experimental methods to be configured and saved for one-step analysis.


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