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Pulse-Energy Sensors
Jul 2007
Coherent Inc.Request Info
SANTA CLARA, Calif., July 2, 2007 -- New pulse-energy sensors from Coherent Inc. are optimized for use with ArF lasers operating at 193 nm and with KrF lasers at 248 nm.

The EnergyMax series sensors feature high accuracy and a large active area and use a novel coating that delivers superior long-term damage resistance. They can perform pulse-energy measurements from 50 to 250 mJ, operate at repetition rates from single shot to 400 Hz and are compatible with Coherent 3sigma, FieldMaxII-TOP, FieldMaxII-P, EPM1000 and EPM2000 meters, Coherent said. 

The excimer laser EnergyMax series comprises four individual products. These are 25-and 50-mm-diameter sensors calibrated at either 193 or 248 nm. Onboard sensors provide automatic temperature compensation, and built-in spectral compensation enables quantitative operation at other wavelengths.

Both sensors accept an optional heat sink, which can be attached by the user to extend the maximum energy or average power range. These heat sinks allow a 25-mm excimer laser sensor to be used up to 18-W average power, and 50-mm sensors to be used up to 43-W average power (both at 193 nm).

For more information, visit:; e-mail:

Coherent Inc.
5100 Patrick Henry Dr.
Santa Clara, CA 95054
Phone: (408) 764-4000
Fax: (408) 764-4800


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