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IDP-3 Dry Scroll Pump
Jul 2007
Agilent Technologies Inc., Vacuum ProductsRequest Info
LEXINGTON, Mass., July 5, 2007 -- Varian Inc., a Palo Alto, Calif.-based supplier of scientific instruments and vacuum technologies, has introduced the IDP-3, a compact, dry scroll pump for applications in which vacuum performance, pump size and environmental concerns are critical, such as analytical instrumentation, high-energy physics, semiconductor fabrication and industrial processing. The compact, quiet and efficient pump is easily integrated into OEMs or vacuum systems or for laboratory use, Varian said.

varian.gif"This innovative solution expands the number of applications for which dry scroll pumps can meet the requirement for smaller primary pumps," said Sergio Piras, senior vice president of its Vacuum Technologies unit in Lexington, Mass.

The IDP-3 is hermetically designed with the motor and bearings outside the vacuum space, allowing full isolation of pumped gases, lower noise and vibration levels, long-term reliability and easy maintenance. The design also minimizes the possibility of seizing or sudden vacuum loss, problems inherent to rotary vane or diaphragm pumps.

Just 14 x 7 x 6 in. (356 x 178 x 152 mms), the IPD-3 delivers a pumping speed of 60 l/m and a very low base pressure, less than 250 mTorr -- almost four times lower than a membrane/diaphragm pump of comparable size. In turbo pump applications, its lower base pressure reduces power consumption and bearing temperature in the pump, making the vacuum system more reliable, Varian said.

The oil-free IDP-3 precludes oil contamination in the vacuum system and eliminates  oil and related maintenance costs.

For more information, visit:; e-mail:

Varian Inc.
Vacuum Technologies
121 Hartwell Ave.
Lexington, MA 02421-3133
Phone: (781) 861-7200
Toll-free: (800) 882-7426
Fax: (781) 860-5437


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